Description
Product Name: Ion Sources Quartz Cup / Quartz Discharge Chamber / Quartz Reaction Chamber
The Advantages of the Quartz Glass Cup:
1) Superior compressive strength2) Withstands extremely high temperatures
3) High thermal shock resistance
4) Low thermal conductivity
5) Extraordinary chemical resistance
Application:
RF Gridded Ion Sources- Cleaning and activation
- Ion-assisted deposition
- Ion-beam etching
- Ion-beam sputtering
- Ion-beam milling
RF Self-neutralized Ion Source
- Plasma Cleaning
- surface activation
- PVD assisting
- PECVD
High-purity gas-smelting fused silica glass, as its Si02 content is more
than 99.99%, extremely high purity, colorless and transparent, less
bubbles and impurities, high ultraviolet and visible light
transmittance, and its thermal and chemical properties are excellent,
are widely used as coating material, used for mirror multilayer coating
and anti-reflective coating, etc.
Refractive Index
1.46021（Wavelength
@546.07nm）
Transmission Range
200～2500nm
Molecular Weight
60.06/mol
Specific Gravity
2.202g/cm3
Hardness
(Mohs)
5.5 ~ 6.5
（Knoop）
416 Kg/mm2
Solubility
Insoluble in water, soluble in
hydrofluoric acid
Content of Metal Impurity（＜ppm）
Name
Fe
Ni
Cu
Ti
Mg
Cr
Content
2
1
1
1
1
1
Melting Temperature
1710~1750℃
Evaporating Temperature
1600～2200℃
Evaporator Source
EB
Vapor Pressure
1Pa ( at 2000℃)
10pa ( at 2200℃)
Features Of Coating Film
Micro-evaporation
Evaporate with electron beam gun
（Pressure：5×10-3Pa）
We can produce, process and supply various shapes and specifications of
quartz glass materials for coating in granular, sheet, ring, spherical,
cylindrical, etc. At the same time, we also produce and supply related
quartz glass parts and components for vacuum coating machine equipment.
Related Properties of Quartz Glass for Coating
Coating Material Shape and Conventional Specifications (mm)
|
Shape |
Specification (mm) |
|||
|
Granular |
<1 |
1~3 |
3~5 |
|
|
Sheet |
Φ15.5X10 |
Φ30X15 |
Φ50X5 |
Φ60X 7 |
|
Ring |
Φ212/Φ170X15 |
Φ300/Φ230X 15 |
Φ335/Φ265X15 |
|
|
Spherical |
Φ5, Φ3 |
|||
|
Cylindrical |
Φ5X5, Φ3X3 |
|||
Quartz Glass Parts for Vacuum Coating Machine Equipment
|
Product |
Specification (mm) |
|
Quartz Glass Crucible/Chamber |
Φ196X63, Φ286X 104 |
|
Quartz Class Sputtering Target Material |
1016X136X6, Φ355X12 |
|
Quartz glass window |
725 X 320X28, 360X 320X 16 |
|
K9 Optical Glass Monitoring Sheet |
Φ160/Φ40X2, Φ142/Φ80X1.8 |
Safe Packing
