Description
Quartz glass chamber for Ion Source 23cm A37-1051-1
Quartz Glass for Plasma Source Vacuum Coating
High-purity gas-smelting fused silica glass, as its Si02 content is more than 99.99%, extremely high purity, colorless and transparent, less bubbles and impurities, high ultraviolet and visible light transmittance, and its thermal and chemical properties are excellent, are widely used as coating material, used for mirror multilayer coating and anti-reflective coating, etc.We can produce, process and supply various shapes and specifications of quartz glass materials for coating in granular, sheet, ring, spherical, cylindrical, etc. At the same time, we also produce and supply related quartz glass parts and components for vacuum coating machine equipment.
Related Properties of Quartz Glass for Coating
|
Refractive Index |
1.46021（Wavelength @546.07nm） |
|||||||
|
Transmission Range |
200～2500nm |
|||||||
|
Molecular Weight |
60.06/mol |
|||||||
|
Specific Gravity |
2.202g/cm3 |
|||||||
|
Hardness |
(Mohs) |
5.5 ~ 6.5 |
||||||
|
（Knoop） |
416 Kg/mm2 |
|||||||
|
Solubility |
Insoluble in water, soluble in hydrofluoric acid |
|||||||
|
Content of Metal Impurity（＜ppm） |
Name |
Fe |
Ni |
Cu |
Ti |
Mg |
Cr |
|
|
Content |
2 |
1 |
1 |
1 |
1 |
1 |
||
|
Melting Temperature |
1710~1750℃ |
|||||||
|
Evaporating Temperature |
1600～2200℃ |
|||||||
|
Evaporator Source |
EB |
|||||||
|
Vapor Pressure |
1Pa ( at 2000℃) |
|||||||
|
10pa ( at 2200℃) |
||||||||
|
Features Of Coating Film |
Micro-evaporation |
|||||||
|
Evaporate with electron beam gun （Pressure：5×10-3Pa） |
||||||||
Coating Material Shape and Conventional Specifications (mm)
|
Shape |
Specification (mm) |
|||
|
Granular |
<1 |
1~3 |
3~5 |
|
|
Sheet |
Φ15.5X10 |
Φ30X15 |
Φ50X5 |
Φ60X 7 |
|
Ring |
Φ212/Φ170X15 |
Φ300/Φ230X 15 |
Φ335/Φ265X15 |
|
|
Spherical |
Φ5, Φ3 |
|||
|
Cylindrical |
Φ5X5, Φ3X3 |
|||
Quartz Glass Parts for Vacuum Coating Machine Equipment
|
Product |
Specification (mm) |
|
Quartz Glass Crucible/Chamber |
Φ196X63, Φ286X 104 |
|
Quartz Class Sputtering Target Material |
1016X136X6, Φ355X12 |
|
Quartz glass window |
725 X 320X28, 360X 320X 16 |
|
K9 Optical Glass Monitoring Sheet |
Φ160/Φ40X2, Φ142/Φ80X1.8 |
