Description
Quartz glass performance used for coating
The Advantages of the Quartz Glass Cup:
1)Superior compressive strength
2) Withstands extremely high temperatures
3) High thermal shock resistance
4) Low thermal conductivity
5) Extraordinary chemical resistance
Application:
RF Gridded Ion Sources Cleaning and activation Ion-assisted deposition Ion-beam etching Ion-beam sputtering Ion-beam milling RF Self-neutralized Ion Source Plasma Cleaning surface activation PVD assisting PECVD Safe Packing For more questions, please send email to me.
Related properties and indicators of Quartz Chamber for coating
Refractive index |
1.46021(wavelength 546.07nm) |
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Transmission range |
200~2500nm |
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Molecular weight |
60.06/mol |
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Specific gravity |
2.202g/cm3 |
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Stiffness (Mohs) (Knoop) |
5.5 ~ 6.5 |
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416 Kg/mm2 |
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Solubility |
Insoluble in water,soluble in hydrofluoric acid |
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Content of metal impurity (<ppm) |
Name |
Fe |
Ni |
Cu |
Ti |
Mg |
Cr |
Content |
2 |
1 |
1 |
1 |
1 |
1 |
|
Fusion temperature |
1710~1750℃ |
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Evaporating temperature |
1600~2200℃ |
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Evaporator source |
EB |
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Vapor tension |
1Pa ( At 2000℃) |
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10pa ( At 2200℃) |
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Features of coating flim |
Minim-evaporization |
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Vaporized by electron beam gun (Tension:5×10-3Pa) |
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