Description
Quartz glass performance used for coating
The Advantages of the Quartz Glass Cup:
1)Superior compressive strength
2) Withstands extremely high temperatures
3) High thermal shock resistance
4) Low thermal conductivity
5) Extraordinary chemical resistance
Application:
RF Gridded Ion Sources Cleaning and activation Ion-assisted deposition Ion-beam etching Ion-beam sputtering Ion-beam milling RF Self-neutralized Ion Source Plasma Cleaning surface activation PVD assisting PECVD Safe Packing For more questions, please send email to me.
Related properties and indicators of Quartz Chamber for coating
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Refractive index |
1.46021（wavelength 546.07nm） |
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Transmission range |
200～2500nm |
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Molecular weight |
60.06/mol |
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Specific gravity |
2.202g/cm3 |
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Stiffness (Mohs) （Knoop） |
5.5 ~ 6.5 |
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416 Kg/mm2 |
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Solubility |
Insoluble in water，soluble in hydrofluoric acid |
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Content of metal impurity （＜ppm） |
Name |
Fe |
Ni |
Cu |
Ti |
Mg |
Cr |
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Content |
2 |
1 |
1 |
1 |
1 |
1 |
|
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Fusion temperature |
1710~1750℃ |
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Evaporating temperature |
1600～2200℃ |
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Evaporator source |
EB |
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Vapor tension |
1Pa ( At 2000℃) |
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10pa ( At 2200℃) |
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Features of coating flim |
Minim-evaporization |
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Vaporized by electron beam gun （Tension：5×10-3Pa） |
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Safe Packing
