Description
Quartz glass chamber for Ion Source 23cm A37-1051-1
Product description:
The Advantages of the Quartz Glass Cup:
Superior compressive strength
2) Withstands extremely high temperatures
3) High thermal shock resistance
4) Low thermal conductivity
5) Extraordinary chemical resistance
Application:
RF Gridded Ion Sources Cleaning and activation Ion-assisted deposition Ion-beam etching Ion-beam sputtering Ion-beam milling RF Self-neutralized Ion Source Plasma Cleaning surface activation PVD assisting PECVD Safe Packing For more questions, please send email to me.
China Optical Quartz Glass Grade
Name |
Corresponding grade |
Feature |
Far Ultraviolet Optical Quartz Glass |
JGS1 |
Transparent in the ultraviolet and visible spectrum; no absorption band in the 185-250nm band; strong absorption band in the 2600-2800nm band; non-luminous, stable light radiation. |
UV optical quartz glass |
JGS2 |
Transparent in the ultraviolet and visible spectrum; no absorption band in the 200-250nm band; strong absorption band in the 2600-2800nm band; non-luminous, stable light radiation |
Infrared optical quartz glass |
JGS3 |
Transparent in the visible and infrared spectrum; no obvious absorption band in the 2600-2800nm band; |
Related properties and indicators of Quartz glass chamber for coating
Refractive index |
1.46021(wavelength 546.07nm) |
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Transmission wavelength range |
200~2500nm |
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Molecular weight |
60.06/mol |
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density |
2.202g/cm3 |
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Moh's hardness |
5.5 ~ 6.5 |
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(Knoop) |
416 Kg/mm2 |
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Solubility |
Insoluble in water, soluble in hydrofluoric acid |
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Metal impurity content(<ppm) |
Name |
Fe |
Ni |
Cu |
Ti |
Mg |
Cr |
content |
2 |
1 |
1 |
1 |
1 |
1 |
|
Melting temperature |
1710~1750℃ |
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Evaporation temperature |
1600~2200℃ |
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Evaporation source |
EB |
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Vapor pressure |
1Pa (2000℃) |
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10pa (2200℃) |
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Film characteristics |
Micro-evaporation |
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Evaporation with electron beam gun(pressure:5×10-3Pa) |
Quartz Characteristic
SIO2 |
99.99% |
Density |
2.2(g/cm3) |
Degree of the hardness moh’ scale |
6.6 |
Melting point |
1732℃ |
Working temperature |
1100℃ |
Max temperature can reach in a short time |
1450℃ |
Acid tolerance |
30 times than ceramic,150 times than stainless |
Visible light transmittance |
Above 93% |
UV spectral region transmittance |
80% |
Resistance value |
10000 times than ordinary glass |
Annealing point |
1180℃ |
Softening point |
1630℃ |
Strain point |
1100℃ |
Optical properties of quartz glass
Wavelength |
Transmittance% |
||
nm |
Synthetic quartz glass |
Fused Quartz glass |
Infrared quartz glass |
170 |
50 |
10 |
0 |
180 |
80 |
50 |
3 |
190 |
84 |
65 |
8 |
200 |
87 |
70 |
20 |
220 |
90 |
80 |
60 |
240 |
91 |
82 |
65 |
260 |
92 |
86 |
80 |
280 |
92 |
90 |
90 |
300 |
92 |
91 |
91 |
320 |
92 |
92 |
92 |
340 |
92 |
92 |
92 |
360 |
92 |
92 |
92 |
380 |
92 |
92 |
92 |
400-2000 |
92 |
92 |
92 |
2500 |
85 |
87 |
92 |
2730 |
10 |
30 |
90 |
3000 |
80 |
80 |
90 |
3500 |
75 |
75 |
88 |
4000 |
55 |
55 |
73 |
4500 |
15 |
25 |
35 |
5000 |
7 |
15 |
30 |