Description
Quartz glass chamber for Ion Source 23cm A37-1051-1
Product description:
The Advantages of the Quartz Glass Cup:
Superior compressive strength
2) Withstands extremely high temperatures
3) High thermal shock resistance
4) Low thermal conductivity
5) Extraordinary chemical resistance
Application:
RF Gridded Ion Sources Cleaning and activation Ion-assisted deposition Ion-beam etching Ion-beam sputtering Ion-beam milling RF Self-neutralized Ion Source Plasma Cleaning surface activation PVD assisting PECVD Safe Packing For more questions, please send email to me.
China Optical Quartz Glass Grade
|
Name |
Corresponding grade |
Feature |
|
Far Ultraviolet Optical Quartz Glass |
JGS1 |
Transparent in the ultraviolet and visible spectrum; no absorption band in the 185-250nm band; strong absorption band in the 2600-2800nm band; non-luminous, stable light radiation. |
|
UV optical quartz glass |
JGS2 |
Transparent in the ultraviolet and visible spectrum; no absorption band in the 200-250nm band; strong absorption band in the 2600-2800nm band; non-luminous, stable light radiation |
|
Infrared optical quartz glass |
JGS3 |
Transparent in the visible and infrared spectrum; no obvious absorption band in the 2600-2800nm band; |
Related properties and indicators of Quartz glass chamber for coating
|
Refractive index |
1.46021（wavelength 546.07nm） |
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|
Transmission wavelength range |
200～2500nm |
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|
Molecular weight |
60.06/mol |
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|
density |
2.202g/cm3 |
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|
Moh's hardness |
5.5 ~ 6.5 |
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|
（Knoop） |
416 Kg/mm2 |
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|
Solubility |
Insoluble in water, soluble in hydrofluoric acid |
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|
Metal impurity content（＜ppm） |
Name |
Fe |
Ni |
Cu |
Ti |
Mg |
Cr |
|
content |
2 |
1 |
1 |
1 |
1 |
1 |
|
|
Melting temperature |
1710~1750℃ |
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|
Evaporation temperature |
1600～2200℃ |
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|
Evaporation source |
EB |
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|
Vapor pressure |
1Pa (2000℃) |
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|
10pa (2200℃) |
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|
Film characteristics |
Micro-evaporation |
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|
Evaporation with electron beam gun（pressure：5×10-3Pa） |
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Quartz Characteristic
|
SIO2 |
99.99% |
|
Density |
2.2(g/cm3) |
|
Degree of the hardness moh’ scale |
6.6 |
|
Melting point |
1732℃ |
|
Working temperature |
1100℃ |
|
Max temperature can reach in a short time |
1450℃ |
|
Acid tolerance |
30 times than ceramic,150 times than stainless |
|
Visible light transmittance |
Above 93% |
|
UV spectral region transmittance |
80% |
|
Resistance value |
10000 times than ordinary glass |
|
Annealing point |
1180℃ |
|
Softening point |
1630℃ |
|
Strain point |
1100℃ |
Optical properties of quartz glass
|
Wavelength |
Transmittance% |
||
|
nm |
Synthetic quartz glass |
Fused Quartz glass |
Infrared quartz glass |
|
170 |
50 |
10 |
0 |
|
180 |
80 |
50 |
3 |
|
190 |
84 |
65 |
8 |
|
200 |
87 |
70 |
20 |
|
220 |
90 |
80 |
60 |
|
240 |
91 |
82 |
65 |
|
260 |
92 |
86 |
80 |
|
280 |
92 |
90 |
90 |
|
300 |
92 |
91 |
91 |
|
320 |
92 |
92 |
92 |
|
340 |
92 |
92 |
92 |
|
360 |
92 |
92 |
92 |
|
380 |
92 |
92 |
92 |
|
400-2000 |
92 |
92 |
92 |
|
2500 |
85 |
87 |
92 |
|
2730 |
10 |
30 |
90 |
|
3000 |
80 |
80 |
90 |
|
3500 |
75 |
75 |
88 |
|
4000 |
55 |
55 |
73 |
|
4500 |
15 |
25 |
35 |
|
5000 |
7 |
15 |
30 |
